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Advances in Applied Ceramics
Structural, Functional and Bioceramics
Volume 109, 2010 - Issue 3: Piezoelectric materials for end users
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Original Article

Electrical and electromechanical characteristics of LTCC embedded piezoelectric bulk actuators

M SobocińskiFaculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wrocaw, Poland
,
R ZwierzFaculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wrocaw, Poland
,
J JuutiMicroelectronics and Materials Physics Laboratories, Department of Electrical and Information Engineering, EMPART Research Group of Infotech Oulu, University of Oulu, PO box 4500, 90570 Oulu, Finland
,
H JantunenMicroelectronics and Materials Physics Laboratories, Department of Electrical and Information Engineering, EMPART Research Group of Infotech Oulu, University of Oulu, PO box 4500, 90570 Oulu, Finland
&
L GolonkaFaculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wrocaw, Poland
Pages 135-138 | Published online: 18 Jul 2013

References

  • S. Achmann, M. Hämmerle, J. Kita and R. Moos: ‘Miniaturized low temperature co-fired ceramics (LTCC) biosensor for ampero-metric gas sensing’, Sensors Actuators B, 2005 135B, (1), 89–95.
  • L. J. Golonka: ‘New application of LTCC technology’, Proc. 28th Int. Spring Semin. on ‘Electronics technology: ‘Meeting the challenges of electronics technology progress’, Vienna, Austria, May 2005, Technische Universitat, 162–166.
  • L. J. Golonka: ‘Technology and applications of low temperature cofired ceramic (LTCC) based sensors and microsystems’, Pot Acad Sci, 2006, 54, (2), 223–233.
  • L. J. Golonka, T. Zawada, H. Roguszczak, K. Malecha, M. Chudy, D. Stadnik and A. Dybko: ‘Three-dimensional fluidic microsystem fabricated in low temperature cofired ceramic technology’, J. Microelectron. Electron. Packag., 2006, 3, (3), 145–151.
  • M. R. Gongora-Rubio, P. Espinoza-Vallejos, L. Sola-Laguna and J. J. Santiago-Aviles: ‘Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)’, Sensors. Actuators A, 2001, 89A, 222–241.
  • M. Sobocinski, J. Juuti, H. Jantunen and L. Golonka: ‘Piezoelectric unimorph valve assembled on an LTCC substrate’, Sensors Actuators A, 2009, 149A, (2), 315–319.
  • M. Hrovat, J. Holc, S. Drnovgek, D. Belavie, J. Bernard, M. Kosec, L. Golonka, A. Dziedzic and J. Kita: ‘Characterization of PZT thick films fired on LTCC substrates’, J. Mater. Set Lett., 2003, 22, 1193–1195.
  • J. Juuti, H. Jantunen, V.-P. Moilanen and S. Leppävuori: ‘Manufacturing of pre-stressed piezoelectric unimorphs using a post-fired biasing layer’, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2006, 53, (5), 838–846.
  • E. Heinonen, J. Juuti and H. Jantunen: ‘Characteristics of piezoelectric cantilevers embedded in LTCC’, J. Eur. Ceram. Soc., 2007, 27, (13-15), 4135–4138.
  • J. Juuti: Acta Universitatis Ouluensis C 235, 2006. Available at: http://herkules.oululdisbn9514279891/
  • H. Moilanen and S. Leppävuori: ‘Laser interferometric measure-ment of displacement-field characteristics of piezoelectric actuators and actuator materials’, Sensors Actuators A, 2001, 92A, 326–334.

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