Hints of atomic scale phenomena in adhesion and friction measurements with MEMS devices

References

• H. Hertz: 'Veber die Berührung fester elastischer Körper', J. Reine Angew. Math., 1882, 92, 156.
   Google Scholar
• J. A. Greenwood and J. B. P. Williamson: 'Contact of nominally flat surfaces', Proc. R Soc. Lond. A, 1966, 295A, 300.
   Web of Science ®Google Scholar
• L. Prandtl: ‘Ein Gedankenmodell zur kinetischen Theorie des festen Körper’, Z. Angew. Math. Mech., 1928, 8, 6.
   Google Scholar
• G. A. Tomlinson: 'A molecular theory of friction', Philos. Mag., 1929, 7, 905.
   Google Scholar
• F. P. Bowden and D. Tabor: 'The friction and lubrication of solids'; 1950, Oxford, Clarendon Press.
   Google Scholar
• C. M. Mate, G. M. McClelland, R. Erlandsson and S. Chiang: 'Atomic scale friction of a tungsten tip on a graphite surface', Phys. Rev. Lett., 1987, 59, 1942.
   Google Scholar
• M. Mehregany, S. D. Senturia and J. H. Lang: 'Friction and wear in microfabricated harmonic side-drive motors', Proc. Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 1990, IEEE, 17.
   Google Scholar
• U. Beerschwinger, D. Mathieson, R. L. Reuben and S. J. Yang: 'A study of wear on MEMS contact morphologies', J. Micromech. Microeng., 1994, 4, 95.
   Google Scholar
• R. Maboudian, W. R. Ashurst and C. Carraro: 'Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments', Sens. Actuators A, 2000, 82A, 219.
   Web of Science ®Google Scholar
• M. P. de Boer, J. A. Knapp, T. M. Mayer and T. A. Michalske: 'The role of interfacial properties on MEMS performance and reliability', Proc. SPIE, 1999, 3825, 2.
   Google Scholar
• K. Deng, G. P. Ramanathan and M. Mehregany: ‘Micromotor dynamics in lubricating fluids’, J. Micromech. Microeng., 1994, 4, 226.
   Google Scholar
• D. Tomanek, W. Zhong and H. Thomas: 'Calculation of an atomically modulated friction force in atomic force microscopy', Europhys. Lett., 1991, 15, 887.
   Google Scholar
• M. Dienwiebel, G. S. Verhoeven, N. Pradeep and J. W. M Frenken: 'Superlubricity of graphite', Phys. Rev. Lett., 2004, 92, 126101.
   PubMed Web of Science ®Google Scholar
• E. Gnecco, R. Bennewitz, T. Gyalog, Ch. Loppacher, M. Bammerlin, E. Meyer and H.-J. Giintherodt: 'Velocity dependence of atomic friction', Phys. Rev. Lett., 2000, 84, 1172.
   Google Scholar
• S. Y. Krylov and J. W. M. Frenken: 'Atomic-scale friction experiments reconsidered in the light of rapid contact dynamics', Phys. Rev. B, 2009, 80B, 235435.
   Google Scholar
• A. D. Corwin and M. P. de Boer: 'Effect of adhesion on dynamic and static friction in surface micromachining', Appl. Phys. Lett., 2004, 84, 2451.
   Web of Science ®Google Scholar
• W. M. van Spengen, R. Puers and I. de Wolf: 'A physical model to predict stiction in MEMS', J. Micromech. Microeng., 2002, 12, 702.
   Google Scholar
• M. P. de Boer: 'Capillary adhesion between elastically hard rough surfaces', Exp. Mech., 2007, 47, 171.
   Google Scholar
• MEMSCAP, available at: http://www.memscap.com.
   Google Scholar
• W. M. van Spengen and J. W.M. Frenken: 'The Leiden MEMS tribometer: real time dynamic friction loop measurements with an on-chip tribometer', Tribot Lett., 2007, 28, 149.
   Web of Science ®Google Scholar
• D. C. Senft and M. T. Dugger: 'Friction and wear in surface micromachined tribological test devices', Proc. SPIE, 1997, 3224, 31.
   Google Scholar
• W. M. van Spengen and T. H. Oosterkamp: 'A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices', J. Micromech. Microeng., 2007, 17, 828.
   Web of Science ®Google Scholar
• W. M. van Spengen, G. H. C. J. Wijts, V. Turq and J. W. M. 'Frenken: `Microscale friction reduction by normal force modula-tion in MEMS', J. Adhes. Set Technol., to be published.
   Google Scholar
• A. Botman, M. B. S. Hesselberth and J. J. L. Mulders: 'Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition', Microdectron. Eng., 2008, 85, 1139.
   Web of Science ®Google Scholar
• M. Grandbois, M. Beyer, M. Rief, H. Clausen-Schaumann and H. E. Gaub: 'How strong is a covalent bond?', Science, 1999, 283, 1727.
   Web of Science ®Google Scholar
• K. B. Jinesh and J. W. M. Frenken: 'Capillary condensation in atomic scale friction: How water acts like a glue', Phys. Rev. Lett., 2006, 96, 166103.
   PubMed Web of Science ®Google Scholar
• K. B. Jinesh and J. W. M. Frenken: 'Experimental evidence for ice formation at room temperature', Phys. Rev. Lett., 2008, 101, 036101.
   Google Scholar
• U. Raviv, S. Perkin, P. Laurat and J. Klein: 'Fluidity of water confined down to subnanometer films', Langmuir, 2004, 20, 5322.
   Web of Science ®Google Scholar