Supplemental material
Journal of Information Display
Volume 25, 2024 - Issue 3
Articles
Compositional tailoring of indium-free GZO layers via plasma-enhanced atomic layer deposition for highly stable IGZO/GZO TFT
Hye-Jin Oha Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea
https://orcid.org/0000-0002-9637-4474View further author information
https://orcid.org/0000-0002-9637-4474View further author information, Yoon-Seo Kima Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of Koreahttps://orcid.org/0000-0001-8446-5523View further author information
https://orcid.org/0000-0001-8446-5523View further author information, Hyun-Jun Jeonga Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea;b R&D Center, Samsung Display, Yongin, Republic of Koreahttps://orcid.org/0000-0001-6419-4420View further author information
https://orcid.org/0000-0001-6419-4420View further author information, , & Jin-Seong Parka Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaCorrespondence[email protected]
https://orcid.org/0000-0002-9070-5666View further author information
https://orcid.org/0000-0002-9070-5666View further author information