Critical Reviews in Solid State and Materials Sciences, Volume 19, Issue 3 (1994)

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Critical Reviews in Solid State and Materials Sciences, Volume 19, Issue 3 (1994)

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Original Articles

Article
Sputtering of compound semiconductor surfaces. II. Compositional changes and radiation-induced topography and damage
Johan B. Malherbe
Pages: 129-195
Published online: 24 Oct 2006
AbstractforSputtering of compound semiconductor surfaces. II. Compositional changes and radiation-induced topography and damage | References | PDF (5.2 MB)
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