Critical Reviews in Solid State and Materials Sciences, Volume 28, Issue 4 (2003)

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Critical Reviews in Solid State and Materials Sciences, Volume 28, Issue 4 (2003)

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Original Articles

Article
High-κ Dielectric Materials for Microelectronics
Robert M. Wallace & Glen D. Wilk
Pages: 231-285
Published online: 24 Jun 2010
AbstractforHigh-κ Dielectric Materials for Microelectronics | PDF (1.1 MB)
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