Critical Reviews in Solid State and Materials Sciences, Volume 31, Issue 3 (2006)

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Critical Reviews in Solid State and Materials Sciences, Volume 31, Issue 3 (2006)

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Original Articles

Article
Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
S. J. Randolph, J. D. Fowlkes & P. D. Rack
Pages: 55-89
Published online: 18 Jan 2007
AbstractforFocused, Nanoscale Electron-Beam-Induced Deposition and Etching | Full Text | References | PDF (8.8 MB)
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