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Functional Diamond
Volume 4, 2024 - Issue 1
Research Article
Electrical actuation of single-crystal diamond MEMS resonators at high temperatures
Zilong ZhangResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan
https://orcid.org/0000-0002-9759-9253View further author information
https://orcid.org/0000-0002-9759-9253View further author information, , , & Meiyong LiaoResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanCorrespondence[email protected]
https://orcid.org/0000-0003-1361-4266View further author information
https://orcid.org/0000-0003-1361-4266View further author information