Supplemental material
Functional Diamond
Volume 4, 2024 - Issue 1
Open access
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Research Article
Electrical actuation of single-crystal diamond MEMS resonators at high temperatures
Zilong ZhangResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japanhttps://orcid.org/0000-0002-9759-9253View further author information
, Keyun GuResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
, Guo ChenResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
, Masataka ImuraResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
& Meiyong LiaoResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanCorrespondence[email protected]
https://orcid.org/0000-0003-1361-4266View further author information
https://orcid.org/0000-0003-1361-4266View further author information
Article: 2346085
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Received 31 Jan 2024, Accepted 16 Apr 2024, Published online: 27 Apr 2024
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