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Functional Diamond Volume 4, 2024 - Issue 1
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Research Article

Electrical actuation of single-crystal diamond MEMS resonators at high temperatures

Zilong ZhangResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanORCID Iconhttps://orcid.org/0000-0002-9759-9253View further author information
ORCID Icon,
Keyun GuResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
,
Guo ChenResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
,
Masataka ImuraResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
&
Meiyong LiaoResearch Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanCorrespondence[email protected]
ORCID Iconhttps://orcid.org/0000-0003-1361-4266View further author information
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Article: 2346085 | Received 31 Jan 2024, Accepted 16 Apr 2024, Published online: 27 Apr 2024

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