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Numerical Heat Transfer, Part A: Applications
An International Journal of Computation and Methodology
Volume 32, 1997 - Issue 5
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Original Articles

THREE-DIMENSIONAL NUMERICAL MODEL FOR THERMAL ANALYSIS IN X-RAY IRRADIATED PHOTORESISTS WITH CYLINDRICAL DOMAIN

W. Dai Department of Mathematics and Statistics, College of Engineering and Science, Louisiana Tech University, Ruston, Louisiana, USA
&
R. Nassar Department of Mathematics and Statistics, College of Engineering and Science, Louisiana Tech University, Ruston, Louisiana, USA
Pages 517-530 | Received 30 Apr 1997, Accepted 07 Jun 1997, Published online: 12 Mar 2007

Citations (9)

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Read on this site (2)

H. Hegab, B. Shen, W. Dai & T. Ameel. (1998) TRANSIENT THREE-DIMENSIONAL NUMERICAL MODEL FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY. Numerical Heat Transfer, Part A: Applications 34:8, pages 805-819.
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W. Dai & R. Nassar. (1998) PRECONDITIONED RICHARDSON NUMERICAL METHOD FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY. Numerical Heat Transfer, Part A: Applications 34:6, pages 599-616.
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Articles from other publishers (7)

W.-J. Chang, W.-L. Chen, Y.-C. Yang & H.-L. Lee. (2007) An inverse problem of estimating the Biot number in deep X-ray lithography. Applied Physics B 90:1, pages 155-162.
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W.-J. Chang, Y.-C. Yang & C.-M. Lin. (2005) Estimating thermal transport in deep X-ray lithography with an inversion method. Applied Physics B 81:4, pages 543-548.
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F Yang & R Pitchumani. (2005) An analytical solution for thermal transport in deep x-ray lithography. Journal of Micromechanics and Microengineering 15:3, pages 474-484.
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W. Dai, Y. Zhang & R. Nassar. (1999) A three dimensional numerical algorithm for predicting temperature rise in resist with arbitrary geometry of pattern during X-ray exposure. Microelectronic Engineering 49:3-4, pages 217-231.
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Weizhong Dai & Raja Nassar. (1999) A domain decomposition method for solving thin film elliptic interface problems with variable coefficients. International Journal for Numerical Methods in Engineering 46:5, pages 747-756.
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W. Dai & R. Nassar. (1999) A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography. International Journal of Numerical Methods for Heat & Fluid Flow 9:6, pages 660-677.
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W. Dai & R. Nassar. (1998) A three‐dimensional numerical method for thermal analysis in X‐ray lithography. International Journal of Numerical Methods for Heat & Fluid Flow 8:4, pages 409-423.
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