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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 124, 1992 - Issue 2
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Section B: Crystal lattice defects and amorphous materials

Structural evolution of the low energy deuterium-implanted silicon

M. V. Sidorov P. N. Lebedev Physical Institute, Department of Solid State Physics, 53 Leninsky prospect, 117924, Moscow, USSR
,
S. R. Oktyabrsky P. N. Lebedev Physical Institute, Department of Solid State Physics, 53 Leninsky prospect, 117924, Moscow, USSR
,
M. A. Lomidze Institute of Physical Chemistry, 31 Leninsky prospect, 117915, Moscow, USSR
&
A. E. Gorodetsky Institute of Physical Chemistry, 31 Leninsky prospect, 117915, Moscow, USSR
Pages 223-232 | Received 02 Feb 1991, Published online: 19 Aug 2006

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M.A. Lomidze, A.E. Gorodetsky & A.P. Zakharov. (1995) Formation of SiD and SiD2 complexes in silicon irradiated by 2 KeV D+ 2 . Radiation Effects and Defects in Solids 133:1, pages 81-86.
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M.A. Lomidze, A.E. Gorodetsky & A.P. Zakharov. (1994) Depth distribution of SiD and SiD2 complexes in silicon bombarded by 10 keV D+ 2 ion. Radiation Effects and Defects in Solids 132:4, pages 387-392.
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