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Integrated Ferroelectrics
An International Journal
Volume 31, 2000 - Issue 1-4
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Section D: Integration

Mechanisms of Pb(zr0.53Ti0.47)O3 thin film etching with ECR/RF reactor

J. Baborowski Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
,
P. Muralt Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
,
N. Ledermann Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
,
E. Colla Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
,
A. Seifert Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
,
S. Gentil Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
&
N. Setter Laboratoire de Céramique, Swiss Federal Institute of Technology, Lausanne (EPFL), Switzerland
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Pages 261-271 | Received 10 Apr 2000, Published online: 12 Sep 2006

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Z. Q. Zhong, M. C. Cao, W. B. Luo, M. R. Li, L. P. Dai & S. Y. Wang. (2021) Etching mechanism of LiTaO3 crystals in CHF3/Ar plasma. Ferroelectrics 582:1, pages 28-35.
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Tianjin Zhang, He Huang & Ren Chen. (2010) Wet Chemical Etching Process of BST Thin Films for Pyroelectric Infrared Detectors. Ferroelectrics 410:1, pages 137-144.
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JACEK BABOROWSKI. (2004) Microfabrication of Piezoelectric MEMS. Integrated Ferroelectrics 66:1, pages 3-17.
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Articles from other publishers (12)

Michael HuffMichael Huff. 2020. Process Variations in Microsystems Manufacturing. Process Variations in Microsystems Manufacturing 99 171 .
Ronald G. Polcawich & Jeffrey S. Pulskamp. 2017. Piezoelectric MEMS Resonators. Piezoelectric MEMS Resonators 39 71 .
. 2011. Ferroelectric Dielectrics Integrated on Silicon. Ferroelectric Dielectrics Integrated on Silicon 281 304 .
Ronald G. Polcawich & Jeffrey S. Pulskamp. 2011. MEMS Materials and Processes Handbook. MEMS Materials and Processes Handbook 273 353 .
C. Soyer, E. Cattan & D. Rèmiens. (2005) Electrical damage induced by reactive ion-beam etching of lead-zirconate-titanate thin films. Journal of Applied Physics 97:11.
Crossref
J. Baborowski. 2005. Electroceramic-Based MEMS. Electroceramic-Based MEMS 325 359 .
Shi Peng & Yao Xi. (2004) Effect of microstructure on reactive ion etching of sol–gel-derived PZT thin film. Ceramics International 30:7, pages 1215-1218.
Crossref
G. Coullerez, J. Baborowski, C. Viornery, Y. Chevolot, N. Xanthopoulos, N. Ledermann, P. Muralt, N. Setter & H.J. Mathieu. (2003) Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films. Applied Surface Science 203-204, pages 527-531.
Crossref
C. Soyer, E. Cattan, D. Rèmiens & M. Guilloux-Viry. (2002) Ion beam etching of lead–zirconate–titanate thin films: Correlation between etching parameters and electrical properties evolution. Journal of Applied Physics 92:2, pages 1048-1055.
Crossref
S. Bühlmann, B. Dwir, J. Baborowski & P. Muralt. (2002) Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size. Applied Physics Letters 80:17, pages 3195-3197.
Crossref
Paul Muralt, Nicolas Ledermann, Jacek J. Baborowski & Sandrine Gentil. 2002. Materials & Process Integration for MEMS. Materials & Process Integration for MEMS 1 24 .
J. Baborowski, N. Ledermann, S. Gentil & P. Muralt. 2001. Transducers ’01 Eurosensors XV. Transducers ’01 Eurosensors XV 596 599 .

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