Mechanisms of Pb(zr_0.53Ti_0.47)O₃ thin film etching with ECR/RF reactor

References

• Cofer , A. , Rajora , P. , DeOrnellas , S. and Keil , D. 1997 . Integrated Ferroelectrics , Vol. 16 : 53 – 61 .
   Google Scholar
• DeOrnellas , S. and Cofer , A. 1998 . Solid State technology . Aug. : 53 – 58 .
   Google Scholar
• Charlet , B. and Davies , K. 1993 . MRS Symp. Proc. , Vol. 310 : 363 – 368 .
   Google Scholar
• Won Chung , C. 1998 . J. Vac. Sci. Technol. , B16 ( 4 ) : 1894 – 1900 .
   Google Scholar
• Pan , Wei , Thio , L. and Desu , S. B. 1995 . C. Won Chung MRS Symp. Proc. , Vol. 361 : 93 – 98 .
   Google Scholar
• Wang , Shinan , li , Jing-Feng , Li , Xinghua and Esashi , Masayoshi . 1998 . Sensor and Materials , Vol. 10 ( 6 ) : 375 – 384 .
   Web of Science ®Google Scholar
• Lee , J. K. , Kim , T. Y. , Chung , I. and Desu , S. Applied Physics Letters . Vol. 75 ( 3 ) 334 – 336 .
   Google Scholar
• Bale , M. and Palmer , R. E. 1999 . J. Vac. Sci. Technol. , A17 ( 5 ) : 2467
   Google Scholar
• Kim , C. J. , Lee , J. K. , Chung , C. W. and Chung , I. 1997 . Integrated Ferroelectrics , 16 : 149 – 157 .
   Web of Science ®Google Scholar
• Saito , K. , Choi , J. H. and Fukuda , T. 1992 . Jpn. J. Appl. Phys. , Vol. 31 : L1260 – L1262 .
   Google Scholar
• Baborowski , J. , Ledermann , N. and Muralt , P. 1999 . Integrated Ferroelectrics . Vol. 27 : 243 – 256 .
   Google Scholar
• Baborowski , J. , Ledermann , N. , Hiboux , S. and Muralt , P. 2000 . Vaccum Vol. , 56 ( 1 ) : 51 – 57 .
   Web of Science ®Google Scholar