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Integrated Ferroelectrics
An International Journal
Volume 10, 1995 - Issue 1-4
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Materials processing—CVD

Manufacturing of perovskite thin films using liquid delivery MOCVD

P. C. Van Buskirk Advanced Technology Materials, Inc., Danbury, CT, 06810, USA
,
J. F. Roeder Advanced Technology Materials, Inc., Danbury, CT, 06810, USA
&
S. Bilodeau Advanced Technology Materials, Inc., Danbury, CT, 06810, USA
Pages 9-22 | Received 18 Apr 1995, Published online: 19 Aug 2006

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P.K. Baumann, D.Y. Kaufman, J. Im, O. Auciello, S.K. Streiffer, R.A. Erck & J. Giumarra. (2001) MOCVD (BaxSr1−x)Ti1+yO3+z (BST) thin films for high frequency tunable devices. Integrated Ferroelectrics 34:1-4, pages 255-262.
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RobertA. York, AmitS. Nagra, Padmini Periaswamy, Orlando Auciello, StephenK. Streiffer & Jaemo Im. (2001) Synthesis and characterization of (BaxSr1−x)Ti1+yO3+z thin films and integration into microwave varactors and phase shifters. Integrated Ferroelectrics 34:1-4, pages 177-188.
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PeterCVan Buskirk, JeffreyF. Roeder, ThomasH. Baum, StevenM. Bilodeau, MichaelW. Russell, StephenT. Johnston, RalphJ. Carl, DeborahJ. Desrochers, BryanC. Hendrix & Frank Hintermaier. (1998) Common and unique aspects of perovskite thin film CVD processes. Integrated Ferroelectrics 21:1-4, pages 273-289.
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M. Schumacher & R. Waser. (1998) Curie - Von Schweidler behaviour observed in ferroelectric thin films and comparison to superparaelectric thin film materials. Integrated Ferroelectrics 22:1-4, pages 109-121.
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Narayan Solayappan, LarryD. Mcmillan, CarlosA.Paz de Araujo & Bob Grant. (1997) Second generation liquid source misted chemical deposition (LSMCD) technology for ferroelectric thin films. Integrated Ferroelectrics 18:1-4, pages 127-136.
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Susanne Hoffmann & RainerM. Waser. (1997) Dielectric properties, leakage behaviour, and resistance degradation of thin films of the solid solution series Ba(Ti1-yZry)O3 . Integrated Ferroelectrics 17:1-4, pages 141-152.
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Rainer Waser. (1997) Dielectric analysis of intergrated ceramic thin film capacitors. Integrated Ferroelectrics 15:1-4, pages 39-51.
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Karsten Rachut, Thorsten J. M. Bayer, Jan O. Wolff, Brigita Kmet, Andreja Benčan & Andreas Klein. (2019) Off‐Stoichiometry of Magnetron Sputtered Ba 1− x Sr x TiO 3 Thin Films . physica status solidi (b) 256:10, pages 1900148.
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Manuel Benkler, F. Paul, J. Schott & T. Hanemann. (2013) Ferroelectric thin film fabrication by direct UV-lithography. Microsystem Technologies 20:10-11, pages 1859-1867.
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Orlando Auciello, Carlos A. Paz de Araujo & Jolanta Celinska. 2014. Emerging Non-Volatile Memories. Emerging Non-Volatile Memories 3 35 .
J.F. Scott, F.D. Morrison, M. Miyake, T. TatsutaO Tsuji. (2007) Layered Functional Ceramics via Misted Chemical Solution Deposition. Key Engineering Materials 333, pages 71-76.
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Orlando Auciello. (2006) Science and technology of thin films and interfacial layers in ferroelectric and high-dielectric constant heterostructures and application to devices. Journal of Applied Physics 100:5.
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Hyeong Joon Kim, Ju Cheol Shin, Cheol Seong Hwang & Sang Yong No. (2012) Deposition and Characterization of High Dielectric Thin Films for Memory Device Application. Surface Review and Letters 10:04, pages 591-604.
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C. B. Parker, J.-P. Maria & A. I. Kingon. (2002) Temperature and thickness dependent permittivity of (Ba,Sr)TiO3 thin films. Applied Physics Letters 81:2, pages 340-342.
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M. Nayak, S. Ezhilvalavan & T.Y. Tseng. 2002. Handbook of Thin Films. Handbook of Thin Films 99 167 .
S. Stemmer, T. Höche, R. Keding, C. Rüssel, R. Schneider, N. D. Browning, S. K. Streiffer & H.-J. Kleebe. (2001) Oxidation states of titanium in bulk barium titanates and in (100) fiber-textured (BaxSr1−x)Ti1+yO3+z thin films. Applied Physics Letters 79:19, pages 3149-3151.
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R Ramesh, S Aggarwal & O Auciello. (2001) Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories. Materials Science and Engineering: R: Reports 32:6, pages 191-236.
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S Ezhilvalavan & Tseung-Yuen Tseng. (2000) Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs. Materials Chemistry and Physics 65:3, pages 227-248.
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Igor Levin, Richard D. Leapman & Debra L. Kaiser. (2011) Microstructure and Chemistry of Nonstoichiometric (Ba,Sr)TiO 3 Thin Films Deposited by Metalorganic Chemical Vapor Deposition . Journal of Materials Research 15:7, pages 1433-1436.
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Jaemo Im, O. Auciello, P. K. Baumann, S. K. Streiffer, D. Y. Kaufman & A. R. Krauss. (2000) Composition-control of magnetron-sputter-deposited (BaxSr1−x)Ti1+yO3+z thin films for voltage tunable devices. Applied Physics Letters 76:5, pages 625-627.
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S. K. Streiffer, Cem Basceri, C. B. Parker, S. E. Lash & Angus I. Kingon. (1999) Ferroelectricity in thin films: The dielectric response of fiber-textured (BaxSr1−x)Ti1+yO3+z thin films grown by chemical vapor deposition. Journal of Applied Physics 86:8, pages 4565-4575.
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I. Levin, R. D. Leapman, D. L. Kaiser, P. C. van Buskirk, S. Bilodeau & R. Carl. (1999) Accommodation of excess Ti in a (Ba, Sr)TiO3 thin film with 53.4% Ti grown on Pt/SiO2/Si by metalorganic chemical-vapor deposition. Applied Physics Letters 75:9, pages 1299-1301.
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Susanne Stemmer, S. K. Streiffer, Nigel D. Browning & Angus I. Kingon. (1999) Accommodation of nonstoichiometry in (100) fiber-textured (BaxSr1−x)Ti1+yO3+z thin films grown by chemical vapor deposition. Applied Physics Letters 74:17, pages 2432-2434.
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P.K. Baumann, D.Y. Kaufman, S.K. Streiffer, J. IM, O. Auciello, R.A. Erck, J. Giumarra, J. Zebrowski, P. Baldo & A. McCormick. (2011) MOCVD Growth and Characterization of (Ba x Sr 1−x )Ti 1+y O 3+z Thin Films for High Frequency Devices . MRS Proceedings 603.
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S. Stemmer, S. K. Streiffer, N. D. Browning & A. I. Kingon. (2011) Microstructure and Nonstoichiometry of Barium Strontium Titanate thin films for dram Applications. MRS Proceedings 574.
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M. Copel, J. D. Baniecki, P. R. Duncombe, D. Kotecki, R. Laibowitz, D. A. Neumayer & T. M. Shaw. (1998) Compensation doping of Ba0.7Sr0.3TiO3 thin films. Applied Physics Letters 73:13, pages 1832-1834.
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Orlando AucielloChris M. FosterRammamoorthy Ramesh. (1998) PROCESSING TECHNOLOGIES FOR FERROELECTRIC THIN FILMS AND HETEROSTRUCTURES. Annual Review of Materials Science 28:1, pages 501-531.
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Chongying Xu, Frank DimeoJrJr, Thomas H. Baum & Michael Russell. (2011) Chemical Vapor Deposition (CVD) of Iridium and Platinum Films and Gas-Phase Chemical Etching of Iridium Thin Films. MRS Proceedings 541.
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J.F. Roeder, I.-S. Chen, P.C. Van Buskirk, H.R. Beratan & C.M. Hanson. (1998) Dielectric and pyroelectric properties of thin film PZT. Dielectric and pyroelectric properties of thin film PZT.
S.K. Streiffer, C. Basceri, C.B. Parker, S.E. Lash, J. Christman, H. Maiwa & A.I. Kingon. (1998) The influence of strain on the dielectric behavior of (Ba/sub x/Sr/sub 1-x/)Ti/sub 1+y/O/sub 3+z/ thin films grown by LS-MOCVD on Pt/SiO/sub 2//Si. The influence of strain on the dielectric behavior of (Ba/sub x/Sr/sub 1-x/)Ti/sub 1+y/O/sub 3+z/ thin films grown by LS-MOCVD on Pt/SiO/sub 2//Si.
Cem Basceri, S. K. Streiffer, Angus I. Kingon & R. Waser. (1997) The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor deposition. Journal of Applied Physics 82:5, pages 2497-2504.
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G. W. Dietz, M. Schumacher, R. Waser, S. K. Streiffer, C. Basceri & A. I. Kingon. (1997) Leakage currents in Ba0.7Sr0.3TiO3 thin films for ultrahigh-density dynamic random access memories. Journal of Applied Physics 82:5, pages 2359-2364.
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M. Copel, P. R. Duncombe, D. A. Neumayer, T. M. Shaw & R. M. Tromp. (1997) Metallization induced band bending of SrTiO3(100) and Ba0.7Sr0.3TiO3. Applied Physics Letters 70:24, pages 3227-3229.
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H. Shen, D. E. Kotecki, R. J. Murphy, M. Zaitz, R. B. Laibowitz, T. M. Shaw, K. L. Saenger, J. Baniecki, G. Beitel, V. Klueppel & H. Cerva. (2011) Microstructure Control of (Ba, Sr)TiO 3 Films for Gigabit Dram . MRS Proceedings 493.
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Christopher M. Foster. 1997. Thin Film Ferroelectric Materials and Devices. Thin Film Ferroelectric Materials and Devices 167 197 .
Scott R. Summerfelt. 1997. Thin Film Ferroelectric Materials and Devices. Thin Film Ferroelectric Materials and Devices 1 42 .
Sandwip K. Dey & Prasad V. Alluri. (2013) PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities. MRS Bulletin 21:6, pages 44-48.
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J.F. Roeder, I.-S. Chen, P.C. Van Buskirk & H.R. Beratan. (1996) Liquid delivery MOCVD of PLT for pyroelectric detectors. Liquid delivery MOCVD of PLT for pyroelectric detectors.

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