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International Journal of Production Research Volume 54, 2016 - Issue 23: Distributed Manufacturing to Enhance Productivity
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Original Articles

Big data analytics for forecasting cycle time in semiconductor wafer fabrication system

Junliang WangSchool of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, ChinaView further author information
&
Jie ZhangSchool of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, ChinaCorrespondence[email protected]
View further author information
Pages 7231-7244 | Received 02 Nov 2015, Accepted 24 Mar 2016, Published online: 22 Apr 2016

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