Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 81, 2006 - Issue 1
Submit an article Journal homepage
37
Views
6
CrossRef citations to date
0
Altmetric
SECTION I: FeRAM PROCESSING

MECHANICAL STABILITY OF Ir ELECTRODES USED FOR STACKED SrBi2Ta2O9 FERROELECTRIC CAPACITORS

J. G. LISONI IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
J. A. JOHNSON IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
J. -L. EVERAERT IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
L. GOUX IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
H. VANDER MEEREN IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
V. PARASCHIV IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
M. WILLEGEMS IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
D. MAES IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
L. HASPESLAGH IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
D. J. WOUTERS IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
,
C. CAPUTA STMicroelectronics, Stradale Primosole, Catania, 95121, Italy
&
R. ZAMBRANO STMicroelectronics, Stradale Primosole, Catania, 95121, Italy
 show all
Pages 37-45 | Received 17 Apr 2005, Accepted 23 Jan 2006, Published online: 17 Aug 2006

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.