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Integrated Ferroelectrics
An International Journal
Volume 88, 2007 - Issue 1
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SECTION I: MEMS, PYROELECTRIC/IR, OPTOELECTRONIC MATERIALS: THIN-FILM PROCESSING

STRESS-INDUCED PHASE FORMATION OF PZT 52/48 THIN FILMS

Q. ZHANG Department of Materials, Cranfield University, Bedfordshire, MK43 0AL, United Kingdom
,
S. CORDOVA Department of Materials, Cranfield University, Bedfordshire, MK43 0AL, United Kingdom
,
J. M. MARSHALL Department of Materials, Cranfield University, Bedfordshire, MK43 0AL, United Kingdom
,
C. P. SHAW Department of Materials, Cranfield University, Bedfordshire, MK43 0AL, United Kingdom
&
R. W. WHATMORE Tyndall National Institute, University College Cork, Cork, Ireland
Pages 85-92 | Received 31 May 2006, Published online: 12 Oct 2011

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