Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 88, 2007 - Issue 1
86
Views
4
CrossRef citations to date
0
Altmetric
SECTION I: MEMS, PYROELECTRIC/IR, OPTOELECTRONIC MATERIALS: THIN-FILM PROCESSING

STRESS-INDUCED PHASE FORMATION OF PZT 52/48 THIN FILMS

, , , &
Pages 85-92 | Received 31 May 2006, Published online: 12 Oct 2011

REFERENCES

  • Scott , J. F. and Paz de Arajuo , C. A. 1989 . Science , 246 : 1400
  • Muralt , P. 2000 . IEEE Trans. Ultrason. Ferroelectr. Frequency Control , 47 : 903
  • Muralt , P. 2000 . J. Micromech. Microeng. , 10 : 136
  • Flynn , A. M. , Tavsrow , L. S. , Bart , S. F. , Brooks , R. A. , Ehrlich , D. J. , Udayakumar , K. and Cross , L. E. 1992 . J. Microelectromech. Syst. , 1 : 44
  • Castellano , R. N. and Feinstein , L. G. 1979 . J. Appl. Phys. , 50 : 4406
  • Krupanidhi , S. B. , Maffeo , N. , Sayer , M. and El-Asselet , K. 1983 . J. Appl. Phys. , 54 : 6601
  • Sreenivas , K. , Sayer , M. and Garrett , P. 1989 . Thin Solid Films , 172 : 251
  • Otsubo , S. , Maeda , T. , Minamikawa , T. , Yonezawa , Y. , Morimoto , A. and Shimizu , T. 1990 . Japanese J. Appl. Phys. , 29 : L133
  • Kwak , B. S. , Boyd , E. P. and Erbil , A. 1988 . Appl. Phys. Lett. , 53 : 1702
  • Sreenivas , K. , Sayer , M. , Baar , D. J. and Nishioka , M. 1988 . J. Appl. Phys. , 54 : 6601 Phys.29, 718 (1990)
  • Budd , K. D. , Dey , S. K. and Payne , D. A. 1985 . Br. Ceram. Proc. , 36 : 107
  • Dey , S. K. , Budd , K. D. and Payne , D. A. 1988 . IEEE Trans. UFFC , 35 : 80
  • Jaffe , B. , Cook , W. R. and Jaffe , H. 1971 . Piezoelectric Ceramics , New York : Academic .
  • Tuttle , B. A. , Voigt , J. A. , Garino , T. J. , Goodnow , D. C. , Schwartz , R. W. , Lamppa , D. L. , Headley , T. J. and Eatough , M. O. 1992 . Processings of the Eighth IEEE International Symposium on Applications of Ferroelectrics . 30 August-2 September 1992 , New York. pp. 344 – 348 .
  • Southin , J. E. A. , Wilson , S. A. , Schmidt , D. and Whatmore , R. W. 2001 . J. Phys. D: Appl. Phys. , 24 : 1456
  • Lian , L. and Sottos , N. R. 2004 . J. Appl. Phys. , 95 ( 2 ) : 629
  • Iancu , O. T. and Munz , D. 1990 . J. Am. Ceram. Soc. , 73 ( 5 ) : 1144
  • Authors' unpublished results

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.