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Science and Technology of Advanced Materials Volume 21, 2020 - Issue 1
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Optical, magnetic and electronic device materials

Strain-enhanced high Q-factor GaN micro-electromechanical resonator

Liwen Sanga International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan;b Amano-Koide Collaborative Research Lab, National Institute for Materials Science, Tsukuba, Ibaraki, JapanCorrespondence[email protected]
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Meiyong Liaoc Wide Bandgap Materials Group, National Institute for Materials Science (NIMS), Ibaraki, JapanORCID Iconhttps://orcid.org/0000-0003-1361-4266View further author information
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Xuelin Yangd State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, ChinaView further author information
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Huanying Suna International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanView further author information
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Jie Zhangd State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, ChinaView further author information
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Masatomo Sumiyac Wide Bandgap Materials Group, National Institute for Materials Science (NIMS), Ibaraki, JapanView further author information
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Bo Shend State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, ChinaView further author information
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Pages 515-523 | Received 26 Apr 2020, Accepted 02 Jul 2020, Published online: 27 Jul 2020

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