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Research Article
TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation
Sabrina M. Curtisa Institute for Materials Science, Kiel University (CAU), Kiel, Germany;b Materials Science and Engineering, University of Maryland, College Park, MD, United StatesView further author information
, Marian Sielenkämpera Institute for Materials Science, Kiel University (CAU), Kiel, Germany
https://orcid.org/0000-0002-5884-1588View further author information
Gowtham Arivanandhanc Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, GermanyView further author information
, Duygu Dengiza Institute for Materials Science, Kiel University (CAU), Kiel, GermanyView further author information
, Zixiong Lic Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, GermanyView further author information
, Justin Jettera Institute for Materials Science, Kiel University (CAU), Kiel, GermanyView further author information
, Lisa Hankea Institute for Materials Science, Kiel University (CAU), Kiel, GermanyView further author information
, Lars Bumkea Institute for Materials Science, Kiel University (CAU), Kiel, GermanyView further author information
, Eckhard Quandta Institute for Materials Science, Kiel University (CAU), Kiel, GermanyView further author information
, Stephan Wulfinghoffa Institute for Materials Science, Kiel University (CAU), Kiel, GermanyView further author information
& Manfred Kohlc Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, GermanyCorrespondence[email protected]
View further author information
show allView further author information
Pages 293-314
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Received 05 Mar 2022, Accepted 24 Apr 2022, Published online: 24 May 2022
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