Increasing detectability in semiconductor foundry by multivariate statistical process control

References

• Cheng , P. C.H. and Dawson , S. D. 1998 . A study of Statistical Process Control: practice, problem and training needs . Total Quality Management , 9 ( 1 ) : 3 – 20 .
   Web of Science ®Google Scholar
• Dale , B. , Shaw , P. and Owen , M. 1990 . SPC in the motor industry: an examination of implementation and use . International Journal of Vehicle Design , 11 ( 2 ) : 213 – 218 .
   Google Scholar
• Dunia , R. and Qin , S. J. 1998 . A unified geometric approach to process and sensor fault identification and reconstruction: the unidimensional case . Computers and Chemical Engineering , 22 ( 6 ) : 927 – 943 .
   Google Scholar
• Fazan , P. C. and Mathews , V. K. 1993 . International Electron Device Meeting (IEDM) Digest , 157 New York : IEEE .
   Google Scholar
• Franceschini , F. 2002 . Learning curves and p-charts for a preliminary estimation of asymptotic performances of a manufacturing process . Total Quality Management , 13 ( 1 ) : 5 – 12 .
   Web of Science ®Google Scholar
• Goetsch , D. L. and Davis , S. 1994 . Introduction to Total Quality: Quality, Productivity, Competitiveness , NY : Prentice Hall .
   Google Scholar
• Goodlin , B. E. , Boning , D. S. , Sawin , H. H. and Wise , B. M. Simultaneous fault detection and classification for semiconductor manufacturing tools . 201st Meeting of the Electrochemical Society, International symposium on Plasma Processing XIV . Philadelphia, PA. pp. 413
   Google Scholar
• Harris , C. R. and Yit , W. 1994 . Successfully implementing statistical process control in integrated steel companies . Interfaces , 24 ( 5 ) : 49 – 58 .
   Web of Science ®Google Scholar
• Kesavan , P. and Lee , J. H.A. 2001 . Set based approach to detection and isolation of faults in multivariable system . Computers and Chemical Engineering , 25 ( 7 ) : 925 – 940 .
   Web of Science ®Google Scholar
• Konsanovich , K. A , Dahl , K. S. and Piovoso , M. J. 1996 . Improved process understanding using multiway principal component analysis . Industrial & Engineering Chemistry Research , 35 ( 2 ) : 138 – 146 .
   Google Scholar
• Kresta , J. , MacGregor , J. F. and Marlin , T. E. 1991 . Multivariate statistical monitoring of process operating performance . The Canadian Journal of Chemical Engineering , 69 ( 1 ) : 35 – 47 .
   Web of Science ®Google Scholar
• Lewis , C. 1993 . Monitoring research-and-development project costs against prespecified targets . R&D Management , 23 ( 1 ) : 43 – 51 .
   Google Scholar
• MacCarthy , B. L. and Wasusri , T. 2001 . Statistical process control for monitoring scheduling performance – addressing the problem of correlated data . Journal of the Operational Research Society , 52 ( 7 ) : 810 – 820 .
   Web of Science ®Google Scholar
• Mandal , P. 2004 . Data quality in statistical process control . Total Quality Management & Business Excellence , 15 ( 1 ) : 89 – 103 .
   Web of Science ®Google Scholar
• Modarress , B. , Ansari , A. and Willis , G. 2000 . Controlled production planning for just-in-time short-run suppliers . International Journal of Production Research , 38 ( 5 ) : 1163 – 1182 .
   Web of Science ®Google Scholar
• Mukhiopadhyay , A. R. 2001 . Statistical process control procedure for controlling moisture content in tobacco . Total Quality Management , 12 ( 3 ) : 299 – 306 .
   Google Scholar
• Rahim , M. A. and Ben-Daya , M. 2001 . Joint determination of production quantity, inspection schedule, and quality control for an imperfect process with deteriorating products . Journal of the Operational Research Society , 52 ( 12 ) : 1370 – 1378 .
   Web of Science ®Google Scholar
• Tagaras , G. and Nikolaidis , Y. 2002 . Comparing the effectiveness of various Bayesian x control charts . Operations Research , 50 ( 5 ) : 878 – 888 .
   Web of Science ®Google Scholar
• Tagaras , G. 1994 . A dynamic-programming approach to the economic design of X-charts . IIE Transactions , 26 ( 3 ) : 48 – 56 .
   Web of Science ®Google Scholar
• Terziovski , M. , Sohal , A. and Moss , S. 1999 . Longitudinal analysis of quality management practices in Australian organizations . Total Quality Management , 10 ( 6 ) : 915 – 926 .
   Web of Science ®Google Scholar
• Wang , F. K. and Eldon , Y. L. 2003 . Confidence intervals in repeatability and reproducibility using the Bootstrap method . Total Quality Management & Business Excellence , 14 ( 3 ) : 341 – 354 .
   Web of Science ®Google Scholar
• Wang , H. , Song , Z. and Wang , H. 2002 . Statistical process monitoring using improved PCA with optimized sensor locations . Journal of Process Control , 12 ( 4 ) : 735 – 744 .
   Google Scholar