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Materials Research Letters
Volume 12, 2024 - Issue 8
Open access
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Original Reports
Influence of co-sputtering AlB2 to TaB2 on stoichiometry of non-reactively sputtered boride thin films
Chun Hua Institute of Materials Science and Technology, TU Wien, Vienna, AustriaCorrespondence[email protected]
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Shuyao Lina Institute of Materials Science and Technology, TU Wien, Vienna, Austria;b Department of Physics, Chemistry, and Biology (IFM), Linköping University, Linköping, Sweden
https://orcid.org/0000-0003-4979-4174View further author information
M. Podsednikc Institute of Chemical Technologies and Analytics, TU Wien, Wien, Austria;d KAI Kompetenzzentrum Automobil- und Industrieelektronik GmbH, Villach, Austria
https://orcid.org/0009-0008-8953-5445View further author information
Stanislav Mráze Materials Chemistry, RWTH Aachen University, Aachen, GermanyView further author information
, T. Wojcika Institute of Materials Science and Technology, TU Wien, Vienna, Austria
https://orcid.org/0000-0001-5091-5215View further author information
A. Limbeckc Institute of Chemical Technologies and Analytics, TU Wien, Wien, Austria
https://orcid.org/0000-0001-5042-2445View further author information
Nikola Koutnáa Institute of Materials Science and Technology, TU Wien, Vienna, Austria;b Department of Physics, Chemistry, and Biology (IFM), Linköping University, Linköping, Sweden
https://orcid.org/0000-0001-7901-4736View further author information
Paul H. Mayrhofera Institute of Materials Science and Technology, TU Wien, Vienna, Austria
https://orcid.org/0000-0001-7328-9333View further author information
Pages 561-570
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Received 10 May 2024, Published online: 02 Jun 2024
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