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Science and Technology of Advanced Materials Volume 21, 2020 - Issue 1
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Energy Materials

Effective silicon production from SiCl4 source using hydrogen radicals generated and transported at atmospheric pressure

Yuji Okamotoa Widegap Semiconductor Group, National Institute for Materials Science, Tsukuba, Japan;b Graduate School of Pure and Applied Sciences, University of Tsukuba, Ibaraki, JapanView further author information
,
Masatomo Sumiyaa Widegap Semiconductor Group, National Institute for Materials Science, Tsukuba, JapanCorrespondence[email protected]
View further author information
,
Yuya Nakamuraa Widegap Semiconductor Group, National Institute for Materials Science, Tsukuba, Japan;b Graduate School of Pure and Applied Sciences, University of Tsukuba, Ibaraki, JapanView further author information
&
Yoshikazu Suzukic Faculty of Pure and Applied Sciences, University of Tsukuba, Ibaraki, JapanView further author information
Pages 482-491 | Received 07 May 2020, Accepted 26 Jun 2020, Published online: 27 Jul 2020

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