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Energy Materials
Effective silicon production from SiCl4 source using hydrogen radicals generated and transported at atmospheric pressure
Yuji Okamotoa Widegap Semiconductor Group, National Institute for Materials Science, Tsukuba, Japan;b Graduate School of Pure and Applied Sciences, University of Tsukuba, Ibaraki, JapanView further author information
, Masatomo Sumiyaa Widegap Semiconductor Group, National Institute for Materials Science, Tsukuba, JapanCorrespondence[email protected]
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Yuya Nakamuraa Widegap Semiconductor Group, National Institute for Materials Science, Tsukuba, Japan;b Graduate School of Pure and Applied Sciences, University of Tsukuba, Ibaraki, JapanView further author information
& Yoshikazu Suzukic Faculty of Pure and Applied Sciences, University of Tsukuba, Ibaraki, JapanView further author information
Pages 482-491
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Received 07 May 2020, Accepted 26 Jun 2020, Published online: 27 Jul 2020
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